[13p-1D-1~26] 15.4 III-V-group nitride crystals

[13p-1D-26] Real-time measurement of low concentration Cp₂Mg using infrared spectroscopy

〇Daisuke Hayashi¹, Atsuko Teraoka¹, Yuhei Sakaguchi¹, Masakazu Minami¹, Hiroshi Nishizato¹ (1.HORIBA STEC)

Keywords:bis-cyclopentadienylmagnesium,metal-organic chemical vapor deposition,infrared spectroscopy

Bis-cyclopentadienylmagnesium (Cp₂Mg) is widely used as a p-dopant of GaN LED. However, as it is difficult to monitor the gas concentration on supplying line, the optimal condition of supplying is generally determined in an empirical way. In this study, we took advantage of a strong peak at 12.8 μm in the infrared absorption spectrum of Cp₂Mg, and successfully monitored low concentration Cp₂Mg gas in real time using non-dispersive infrared spectroscopy (NDIR) method.