5:15 PM - 5:30 PM
[13p-1E-15] Thermo-statistical modeling for getterings in a silicon wafer
Keywords:Si Wafer,Gettering
Oral presentation
15 Crystal Engineering » 15.8 Crystal evaluation, impurities and crystal defects
Sun. Sep 13, 2015 1:15 PM - 6:00 PM 1E (143)
座長:小野 敏昭(SUMCO),関口 隆史(NIMS)
5:15 PM - 5:30 PM
Keywords:Si Wafer,Gettering