[13p-1F-3~18] 8.0 Plasma Electronics English Session

▲ [13p-1F-4] Reconsideration of Electron Temperature of Plasmas with Non-Maxwellian EEDF Based
on Statistical-Thermodynamical Discussion

〇Hiroshi Akatsuka¹, Yoshinori Tanaka¹ (1.Tokyo Tech.)

Keywords:Electron Temperature,Electron Energy Distribution Function,Entropy

We reconsider electron temperature of non-equilibrium oxygen plasmas based on thermodynamics and statistical physics by the relationship between entropy and mean energy of electron gas. First, we solve the Boltzmann equation to obtain electron energy distribution function (EEDF) of the oxygen plasma for a given reduced electric field E/N. We also simultaneously solve kinetic equations to determine some essential excited species in the oxygen plasma, since the EEDF should be self-consistently solved with the densities of collision partners. Next, we calculate the electron mean electron energy U and entropy S from the calculated EEDF. Then, we can obtain the electron temperature calculated as T_e^th = [∂S/∂U]^–1. We discuss the difference between T_e^th and T_e^k ≡ (2/3)U, as well as the temperature given as a slope of the calculated EEDF for each value of E/N from the viewpoint of statistical physics as well as elementary processes.