Plasma-Induced Damage of GaN by Chlorine-containing Plasma

Presentation information

Oral presentation

8 Plasma Electronics » 8.0 Plasma Electronics English Session

Sun. Sep 13, 2015 2:30 PM - 6:45 PM 1F (Reception Hall 1)

Chair:Fumiyoshi Tochikubo(Tokyo Metropolitan Univ.),Hiroshi Akatsuka(Titech)

4:00 PM - 4:15 PM

〇DAISUKE OGAWA¹, Yoshitsugu Banno¹, Yoshitaka Nakano¹, Keiji Nakamura¹ (1.Chubu University)

Keywords:plasma-induced plasma,gallium nitride,in-situ monitoring