Effects of Cluster Eliminating Filter on Extremely Thin a-Si:H Films Deposited by SiH<sub>4</sub> Multi-Hollow Discharges

Yoshihiro Torigoe

Presentation information

Oral presentation

8 Plasma Electronics » 8.0 Plasma Electronics English Session

[13p-1F-3~18] 8.0 Plasma Electronics English Session

Sun. Sep 13, 2015 2:30 PM - 6:45 PM 1F (Reception Hall 1)

Chair:Fumiyoshi Tochikubo(Tokyo Metropolitan Univ.),Hiroshi Akatsuka(Titech)

4:15 PM - 4:30 PM

▼ [13p-1F-9] Effects of Cluster Eliminating Filter on Extremely Thin a-Si:H Films Deposited by SiH₄ Multi-Hollow Discharges

〇Yoshihiro Torigoe¹, Susumu Toko¹, Kimitaka Keya¹, Daisuke Yamashita¹, Hyunwoong Seo¹, Naho Itagaki¹, Kazunori koga¹, Masaharu Shiratani¹ (1.Kyushu Univ.)

Keywords:a-Si:H

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Presentation information

[13p-1F-3~18] 8.0 Plasma Electronics English Session

▼ [13p-1F-9] Effects of Cluster Eliminating Filter on Extremely Thin a-Si:H Films Deposited by SiH4 Multi-Hollow Discharges

▼ [13p-1F-9] Effects of Cluster Eliminating Filter on Extremely Thin a-Si:H Films Deposited by SiH₄ Multi-Hollow Discharges