The 76th JSAP Autumn Meeting, 2015

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3 Optics and Photonics » 3.7 Laser processing

[13p-2F-1~16] 3.7 Laser processing

Sun. Sep 13, 2015 1:45 PM - 6:15 PM 2F (221-2)

座長:渡邉 歴(立命大),中村 大輔(九大)

2:00 PM - 2:15 PM

△ [13p-2F-2] In Situ Measurement of Crystallization Process of Tin Oxide Films in ELAMOD Process

〇(M1C)Tsukasa Katsuki1, Tomohiko Nakajima2, Tetsuo Tsuchiya2, Atsushi Yumoto1, Kentaro Shinoda2 (1.Shibaura Inst. Tech., 2.AIST)

Keywords:oxide,chemical solution deposition,excimer laser