Structure analysis of nanoporous SiO<sub>2</sub> films formed by pulsed-laser deposition using F<sub>2</sub> laser

Presentation information

Oral presentation

3 Optics and Photonics » 3.7 Laser processing

Sun. Sep 13, 2015 1:45 PM - 6:15 PM 2F (221-2)

座長:渡邉歴(立命大),中村大輔(九大)

2:30 PM - 2:45 PM

〇Daichi Taniyama¹, Hiroshi Ikenoue¹, Tomoyuki Ohkubo¹, Daisuke Nakamura¹, Tatsuo Okada¹ (1.Kyushu Univ.)

Keywords:porous film,low-k,F2 laser