[13p-2Q-1~27] 6.4 Thin films and New materials

[13p-2Q-15] Effect of pre-deposition process of Ag auto-doping layer on Mg₂Sn thin film

〇tatsuki yokoyama¹, mikihiko nishitani^1,2, yukihiro morita^1,2, tetsusei kurashiki¹ (1.Osaka Univ., 2.Panasonic Corporation.)

Keywords:thin film,Mg2Sn,Ag

Currently, Bi₂Te₃ and PbTe as a thermoelectric material have high thermoelectric properties, there are problems with abundance and toxicity. Then, Mg₂Sn can be expected to have highest thermoelectric property near room temperature as a replacement material, influence on the thermoelectric property of the microstructure in Mg₂Sn thin film is discussed. In this study, the amorphous substrate is subjected to Mg₂Sn thin film growth after formed the Ag thin film on for the purpose of Ag addition to Mg₂Sn thin film, to investigate the microstructure of the thin film and the thermoelectric properties.