[13p-2Q-1~27] 6.4 Thin films and New materials

[13p-2Q-27] Thermal Shock Resistance of Y₂O₃ Films Synthesized With Metal-EDTA Complexes

〇(B)Yanxin Dan¹, Atsushi Nakamura^2,1, Keiji Komatsu¹, Hidetoshi Saitoh¹ (1.Nagaoka Univ. Tech., 2.Chubu Chelest Co., Ltd.)

Keywords:metal-EDTA complexe,Y2O3,thermal shock resistance

An EDTA·Y·H complex was prepared and used as the staring material for the synthesis of Y₂O₃ films with a flame-spraying apparatus.From a previous report, although thermally extreme environments were employed during the synthesis, all of the obtained Y₂O₃ films showed only a few cracks and minor peeling in their microstructures. In this study, thermal shock resistance of Y₂O₃ films synthesized with metal-EDTA complexes was investigated.