[13p-2S-1~15] 3.15 Silicon photonics

△ [13p-2S-4] Silicon microring resonator-loaded Mach-Zehnder modulator with interleaved PN junctions

〇Hiroyuki Honma¹, Rajdeep Gautam¹, Taro Arakawa¹, Yasuo Kokubun¹ (1.Yokohama National Univ.)

Keywords:silicon optical modulator,semiconductor

Silicon Mach-Zehnder modulators (MZMs) are essential device in optical communication networks in silicon photonics circuits. In addition, a silicon waveguide modulator with a periodically interleaved PN junction in place of a conventional lateral PN junction was proposed, and has been investigated for realizing more effective carrier depletion and lower voltage operation.In this study, we fabricated a silicon MRR-MZM with the interleaved PN junction for the first time, and investigated its static modulation characteristics, comparing with an MRR-MZM with a conventional lateral PN junction.