[13p-2T-1~8] 9.4 Thermoelectric conversion

▲ [13p-2T-3] Fabrication and testing of compact thermoelectric module based on ZnO and Ca₃Co₄O₉ thin films

〇Paolo Mele¹, Shrikant Saini^2,3, Hiroaki Honda², Takashi Suzuki², Kaname Matsumoto⁴, Koji Miyazaki⁴ (1.Muroran Inst.Tech., 2.Hiroshima Univ., 3.Univ. of Utah, 4.Kyushu Inst. Tech.)

Keywords:Thermoelectric module,thin film oxides

Compact thin film modules (5 legs of n-type: Al_0.02Zn_0.98O, AZO; 5 legs of p-type: Ca₃Co₄O₉) were fabricated on Al₂O₃, SrTiO₃ (STO) single crystal and fused silica substrates by pulsed laser deposition (PLD).
Performance of modules was evaluated using ad-hoc customized system where the module was set vertically. The largest output power was obtained on Al₂O₃ with T_hot-T_cold = 230 °C: P_max =29.9 pW. This result is encouraging for the practical applications of thermoelectric oxide thin films, looking forward to the fabrication of modules on flexible substrates for ubiquitous harvesting of the waste heat.