[13p-2T-1~8] 9.4 Thermoelectric conversion

[13p-2T-7] ZT enhancement of poly-Si thin films by phononic crystal nanopatterning

〇Masahiro Nomura^1,2,3, Yuta Kage¹, David Muller³, Dominik Moser³, Oliver Paul³ (1.IIS, Univ. of Tokyo, 2.Nanoquine, 3.Univ. of Freiburg)

Keywords:phononic crystal,phononics

We formed phononic crystal nanopatterns (period = 300 nm) in a poly-Si thin membrane and observed the ZT enhancement by a factor of 3.