3:15 PM - 3:30 PM
[13p-2W-8] Selective Growth of Ge Thin Films by using Metal Organic Chemical Vapor Deposition
Keywords:germanium,MOCVD,selective growth
Oral presentation
15 Crystal Engineering » 15.5 Group IV crystals and alloys
Sun. Sep 13, 2015 1:15 PM - 5:30 PM 2W (234-2(North))
座長:黒澤 昌志(名大),都甲 薫(筑波大)
3:15 PM - 3:30 PM
Keywords:germanium,MOCVD,selective growth