The 76th JSAP Autumn Meeting, 2015

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Symposium » What is the last knob of Ge-CMOS?

[13p-4C-1~9] What is the last knob of Ge-CMOS?

Sun. Sep 13, 2015 1:15 PM - 5:00 PM 4C (432)

座長:右田 真司(産総研),最上 徹(PETRA)

2:00 PM - 2:15 PM

[13p-4C-3] Wet Cleaning and Surface Preparation for SiGe and Ge

〇Hiroaki Takahashi1, Masayuki Wada1, Yukifumi Yoshida2, Farid Sebaai3, Frank Holsteyns3, Paul Mertens3, Masanobu Sato1, Hajime Shirakawa1 (1.SCREEN, 2.SCREEN SPE Germany, 3.imec)

Keywords:Cleaning,Surface preparation,Ge