[13p-4E-1~20] 6.5 Surface Physics, Vacuum

[13p-4E-16] Theoretical study of vacuum conductance of rare gases through nanopipette

Takeshi Sugawara¹, 〇Tomohide Takami², Yuji Takakuwa³ (1.RcMcD, Hiroshima Univ., 2.Kogakuin Univ., 3.IMRAM, Tohoku Univ.)

Keywords:glass pipette,vacuum conductance,rare gas

We have been developing a system to evaluate the inner diameters and shank lengths of glass nanopipettes. Here, we have tried to evaluate the experimental data of vacuum conductance of rare gases through nanopipette by kinetic theoretical calculation developed by Sharipov et al.