[13p-PA2-1~11] 3.2 Equipment optics and materials

[13p-PA2-2] Moth-eye structure production using a laser direct drawing way by nonlinear time constant operation

〇Ryosuke Funakoshi¹, Chikara Egami¹ (1.Shizuoka Univ.)

Keywords:laser fabrication,nonlinear optics,photoresist

Laser direct drawing has formed Moth-eye structure by modulating nonlinear time constant of photoresists with a low cost CW laser and its validity was considered by this research. Detail will be introduced on the day.