[13p-PA5-1~4] 13.3 Insulator technology

[13p-PA5-3] Evaluation of Traps in Ge-MIS Structures Fabricated by Radical-Enhanced ALD

〇Hidehumi Narita¹, Daichi Yamada², Yukio Fukuda², Yosuke Kanuka¹, Hiroshi Okamoto¹ (1.Hirosaki Univ., 2.Tokyo Univ. of Science, Suwa)

Keywords:Ge-MIS,Interface state,DLTS