[13p-PB6-1~20] 21.1 Joint Session K

[13p-PB6-1] Atmospheric-pressure CVD Growth of β-Ga₂O₃ Nanostructures and Their Photoluminescence Properties

〇Tomoaki Terasako¹, Yuya Ohmori², Yuki Kawasaki², Takuya Saeki², Naoki Monden², Akira Miyata², Masakazu Yagi³ (1.Grad. School Sci. Eng., Ehime Univ., 2.Fac. Eng., Ehime Univ., 3.Natl. Inst. Technol., Kagawa Coll.)

Keywords:Ga2O3,nanostructures,photoluminescence

In this paper, shape-controlled growth of β-Ga₂O₃ nanostructures by atmospheric-pressure CVD using Ga and H₂O as source materials utilizing Au catalyst and their photoluminescence properties will be presented. SEM observations revealed the diversity of shapes of the nanostructures probably related to both the comprtition between VLS and VS growth mechanisms and the variation of the Au particle size with temperature. The shapes of the PL spectra were dependent on the shapes of the nanostrutures.