4:00 PM - 6:00 PM
[13p-PB6-1] Atmospheric-pressure CVD Growth of β-Ga2O3 Nanostructures and Their Photoluminescence Properties
Keywords:Ga2O3,nanostructures,photoluminescence
In this paper, shape-controlled growth of β-Ga2O3 nanostructures by atmospheric-pressure CVD using Ga and H2O as source materials utilizing Au catalyst and their photoluminescence properties will be presented. SEM observations revealed the diversity of shapes of the nanostructures probably related to both the comprtition between VLS and VS growth mechanisms and the variation of the Au particle size with temperature. The shapes of the PL spectra were dependent on the shapes of the nanostrutures.