[13p-PB6-1~20] 21.1 Joint Session K

[13p-PB6-6] Analysis of Conduction Mechanisms of Non-doped ZnO Films Deposited by RF Sputtering

〇(D)Jiesheng Zhang¹, Yasuhisa Omura¹, Tadashi Saitoh¹ (1.Kansai Univ.)

Keywords:ZnO film,XPS analysis

In this report, we explained the Conduction Mechanisms of Non-doped ZnO Films by using the oxygen vacancy concentrations in the neighborhood of ZnO atoms, which were analyzed by the variation of O1s spectrum intensity from XPS technique.