The 76th JSAP Autumn Meeting, 2015

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13 Semiconductors » 13.4 Si wafer processing /MEMS/Integration technology

[14a-1C-1~10] 13.4 Si wafer processing /MEMS/Integration technology

Mon. Sep 14, 2015 9:00 AM - 11:45 AM 1C (135)

座長:佐々木 実(豊田工大),石井 仁(豊橋技科大)

10:30 AM - 10:45 AM

[14a-1C-6] Wavelength selective silicon-on-insulator diode uncooled infrared focal plane array

〇DAISUKE FUJISAWA1, OGAWA SHINPEI1, HATA HISATOSHI1, UETSUKI MITSUHARU1, MISAKI KOJI1, TAKAGAWA YOUSUKE2, KIMATA MASAFUMI2 (1.Mitsubishi Electric Corp., 2.Ritsumeikan Univ.)

Keywords:Infrared