[14a-2F-1~9] 3.7 Laser processing

[14a-2F-2] Micromachining of polydimethylsiloxane using LPP EUV radiation

〇Hikari Urai¹, Mizuki Ogawa¹, Shintaro Fukami¹, Shuichi Torii¹, Tetsuya Makimura¹, Daisuke Nakamura², Akihiko Takahashi², Tatsuo Okada², Hiroyuki Niino³ (1.Univ. of Tsukuba, 2.Kyushu Univ., 3.AIST)

Keywords:EUV,polydimethylsiloxane,micromachining