[14a-2F-1~9] 3.7 Laser processing

[14a-2F-6] Fabrication of Si nanoparticles by laser ablation in liquid

Kazuhei Hayashi¹, Pattarin Chewchinda¹, Osamu Odawara¹, 〇Hiroyuki Wada¹ (1.Tokyo Inst. Tech.)

Keywords:silicon,nanoparticle,ablation

Si nanoparticles were prepared by laser ablation in liquid. Laser was Nd:YAG/SHG and solvent was ultrapure water. For characterization, TEM observation, photoluminescence spectra, absorption spectra and XPS analysis were used. Ablation of Si particles created nanoparticles. However, surface oxidation proceeded. To prevent the surface oxidation, Ar bubbling was used.