The 76th JSAP Autumn Meeting, 2015

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1 Interdisciplinary Physics and Related Areas of Science and Technology » 1.6 Ultrasonics

[14a-2K-1~12] 1.6 Ultrasonics

Mon. Sep 14, 2015 9:00 AM - 12:15 PM 2K (225)

座長:近藤 淳(静岡大)

10:45 AM - 11:00 AM

△ [14a-2K-7] Polarity inverted Al-polar (0001) ScAlN/ O-polar (000-1) ZnO film resonators

〇Takeshi Mori1, Masashi Suzuki2, Takahiko Yanagitani2 (1.Nagoya Inst. Tech., 2.Waseda Univ.)

Keywords:polarity inverted,ScAlN,piezoelectric devices