The 76th JSAP Autumn Meeting, 2015

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9 Applied Materials Science » 9.2 Nanowires and Nanoparticles

[14a-2Q-1~13] 9.2 Nanowires and Nanoparticles

Mon. Sep 14, 2015 9:00 AM - 12:30 PM 2Q (231-1)

座長:古藤 誠(キヤノン)

11:15 AM - 11:30 AM

[14a-2Q-9] Fabrication of Si quantum dots using Neutral Beam Etching and its Thermal characteristics

〇AKIOU KIKUCHI1,2, AKIFUMI YAO2, ISAMU MORI2, MASAKAZU NAKAMURA3, ICHIRO YAMASHITA3, KENTARO SAWANO4, SEIJI SAMUKAWA5, TAKAHITO ONO1 (1.GSE, Tohoku Univ., 2.Central Glass .co .ltd., 3.NAIST, 4.Tokyo City Univ., 5.IFS, Tohoku Univ)

Keywords:semiconductor