[14a-4C-1~10] 13.3 Insulator technology

[14a-4C-4] Electrical properties of interface between High-k material and Ge with Ge nitride

〇yuji tanaka¹, Yoshitaka Iwazaki¹, Tomo Ueno¹ (1.Tokyo Univ. of Agri. & Tech.)

Keywords:germanium,nitride