[14a-4D-1~11] 13.7 Nano structures and quantum phenomena

[14a-4D-1] Radiative Recombination for GaAs Quantum Nanopillar by using Biotemplate and Neutral Beam Etching

〇Daisuke Ohori¹, Kiyofumi Kondo¹, Cedric Thomas², Akio Higo³, Seiji Samukawa², Tetsuo Ikari¹, Atsuhiko Fukuyama¹ (1.Univ. of Miyazaki, 2.IFS, Tohoku Univ., 3.WPI-AIMR, Tohoku Univ.)

Keywords:neutral beam,nanopillar,quantum dots

We succeeded to fabricate the nanopillars with 6-fold stacked nanodisk by using bio-template and neutral beam etching. Observed multiple photoluminescence peaks of the nanopillars in the photon energy region from 1.57 to 1.64 EV were found to be emissions from the quantum levels in the nanodisks. Theoretical calculation by a COMSOL and the TEM observation also supported the results.