[14a-4E-1~7] 7.4 Buried interface sciences with quantum beam

[14a-4E-6] Interfacial electronic structure analysis of TaO_x nanosheet/SiO₂/Si by charging-controlled x-ray photoelectron spectroscopy

〇Satoshi Toyoda¹, Fukuda Katsutoshi¹, Sugaya Hidetaka¹, Morita Masahito¹, Nakata Akiyoshi¹, Uchimoto Yoshiharu¹, Matsubara Eiichiro¹ (1.Kyoto Univ.)

Keywords:nanosheet,interface,x-ray photoelectron spectroscopy