[14a-4E-1~7] 7.4 Buried interface sciences with quantum beam

[14a-4E-7] Correlations between structures and electrical characteristics of La-substituted bismuth titanate thin films on Si substrates

〇Atsushi Kohno¹, Takayuki Tajiri¹ (1.Fukuoka Univ.)

Keywords:ferroelectrics,film and interface structure,X-ray reflectivity and diffracation

Ferroelectric Bi_4-xLa_xTi₃O₁₂ (BLT) thin films have been formed on p-type Si(100) substrates by using chemical solution deposition method. The film structure and crystal orientation have been analyzed by X-ray reflectivity and diffraction. The correlations between structures including crystal orientation and electrical characteristics of Au/BLT/p-Si structures are reported and discussed.