[14a-4F-1~11] 6.2 Carbon-based thin films

△ [14a-4F-1] Deposition of DLC Thin Film on Sacrificial Rock Sugar and its Self-Standing

〇masafumi yamano¹, yu miyamoto¹, takahiro imai¹, Toru Harigai¹, Yoshiyuki Suda¹, Hirofumi Takikawa¹, Masao Kamiya², Makoto Taki³, Yushi Hasegawa³, Nobuhiro Tsuji³, Mamiko Nishiuchi⁴, Hironao Sakaki⁴, Kiminori Kondoaa⁴ (1.Toyohashi Univ. of Tec., 2.Itoh Opt. Ind. Co., Ltd., 3.Onward Ceramic Coating Co., Ltd., 4.Japan atomic energy agency)

Keywords:DLC,Filtered Arc Deposition,Self-standing thin film