[14a-4F-1~11] 6.2 カーボン系薄膜

▲ [14a-4F-8] Feasibility Study on Corrosion of Diamond-Like Carbon Films by Soft X-ray Photoelectron Emission Microscopy

〇(D)Sarayut Tunmee¹, Pat Photongkam², XiaoLong Zhou¹, Satoru Arakawa¹, Haruhiko Ito¹, Kazuhiro Kanda³, Keiji Komatsu¹, Hidetoshi Saitoh¹ (1.Nagaoka Univ. Tech., 2.Synchrotron Light Research Inst., 3.LASTI, Univ. of Hyogo)

キーワード：X-PEEM,Corrosion,Diamond-Like Carbon Films

The soft X-ray photoelectron emission microscopy (X-PEEM) is a powerful synchrotron radiation-based characterization tool to study the corrosion of the thin-films, which combined with the near-edge X-ray absorption fine-structure (NEXAFS) spectroscopy. The event leads to expect for studying the small corrosion region on surface of the diamond like carbon (DLC) films. Therefore, the aim of this work is to study the chemical information in the uncorroded and corroded regions of the DLC films.X-PEEM were performed to characterize the corroded and uncorroded regions of the DLC films, using the soft X-ray synchrotron light source at BL 3.2b end-station at the Synchrotron Light Research Institute (Thailand), which is generated at 1.2 GeV.