[14a-4F-1~11] 6.2 Carbon-based thin films

[14a-4F-9] Investigation of oxygen plasma treatment for surface modification of DLC films

〇yuta kawachi¹, Takuya koide¹, Ryoya yamaguchi¹, Akihiko Homma¹, Kenji Hirakuri¹, Ohgoe Yasuharu¹ (1.Tokyo Denki Univ.)

Keywords:Carbon film,oxygen plasma