[14a-PA1-1~6] 6.1 Ferroelectric thin films

[14a-PA1-1] Effect of Proton Beam Irradiation of Ferroelectric Thick Film Properties

〇Masaki Yamaguchi^1,2, Hiroyuki Nishikawa^1,2, Yoichiro Masuda³ (1.Shibaura Inst. of Tech., 2.RCGI, Shibaura Inst. of Tech., 3.Hachinohe Inst. of Tech.)

Keywords:Ferroelectricity,Proton Beam Writing

Fabrication of ferroelectric thick films, on a very small area of a substrate is an interesting technology from the viewpoint of future microelectric device processing. In this paper, we discuss bismuth-titanate thick-film deposition on silicon with MOD sloutions containing polyvinylpyrrolidone. We also discuss the effect of PB irradiation of bismuth-titanate thick film properties.