[14p-1B-1~9] Evaluation technology for oxide semiconductor

[14p-1B-3] Characterization of oxide semiconductors using hard x-ray and soft x-ray double source laboratory photoemission spectroscopy system

〇Hisao Makino^1,2, Jun-ichi Nomoto¹, Tetsuya Yamamoto¹ (1.Res. Inst. of KUT, 2.Kochi Univ. of Tech.)

Keywords:Oxide semiconductor,XPS

We will report recent achivements on characterization of near surface region of Ga-doped ZnO thin films using hard x-ray and soft x-ray double source laboratory photoemission spectroscopy system as an example.