[14p-1B-1~9] Evaluation technology for oxide semiconductor

[14p-1B-5] Development of AFM evaluaton technologies for topography or physical property on semiconductor & electric materials

〇Noboru Terata¹ (1.Park Systems Japan Inc.)

Keywords:AFM,Atomic Froce Microscope,Scanning Probe Microscope

AFM( Atomic Force Microscope/Scanning Probe Microscope) has been extreamly advancing its capabilities in many ways in 30 years after introduced in the market. In this talk, the latest updates of the development of AFM topography measurment technology which has overcome the difficulties on the previous AFM and the improvement of electrical propery measurement modes which would be extending the capabilities in many applicatons will be introduced.