[14p-2C-1~12] 4.3 Optical Micro-sensing, Manipulation, and Fabrications

▲ [14p-2C-12] Investigation of ripple pattern formation by Bessel Gaussian femtosecond laser beam on Si and Al surface in submicron meter scale; polarization effect

〇(M2)Shota Sekiguchi¹, Hirotaka Yoneya¹, Hiroshi Nozawa¹, Yuya Akashi¹, Takashi Yagi¹ (1.Tokai Univ.)

Keywords:femtosecond laser,periodical ripple,Bessel beam

The effects of the periodical ripples to the sub-micron meter laser machining with linear polarization is to deteriorate the machining performance, however, it works rather beneficial to form trenches of ~100nm width by scanning the laser beam in perpendicular to the laser polarization. In the present work we investigate the effect of the ripple formation associated with the sub-micron machining by the Bessel beam on the micromachining performance with the fluence lower than the ablation threshold and various polarization.