[14p-2C-1~12] 4.3 Optical Micro-sensing, Manipulation, and Fabrications

▲ [14p-2C-2] T-shape Suspended Silicon Nitride Microring Resonator Sensor

〇(PC)Jijun Feng¹, Ryoichi Akimoto¹ (1.Nat. Inst. of Adv. Indust. Sci. & Technol.)

Keywords:resonance sensor,silicon nitride,integrated optics

A T-shape suspended silicon nitride racetrack ring resonator sensor sitting on a silicon dioxide pedestal is experimentally demonstrated. Compared with unsuspended device, it allows an enhanced interaction with the surrounded environment while maintaining a high quality factor. The resonator consists of a directional coupler with a waveguide width of 1.3 μm and a ring structure with curve radius of 20 μm. More than 1.6×10⁴ quality factor at a wavelength of 1550.4 nm can be obtained, with a moderate extinction ratio of about 9.2 dB and a free-spectral range of 5.48 nm. The measured device sensitivity is about 247 nm/RIU. The device is expected to have a wide optical sensing application prospect.