[14p-2G-1~13] CS1 3.5/3.14 Code-sharing session

[14p-2G-1] [Young Scientist Presentation Award Speech] Fabrication, evaluation and device application of ridge waveguide in bonded ion-sliced LiNbO₃ by proton-exchange accelerated etching

〇Keisuke Tanaka¹, Toshiaki Suhara¹ (1.Osaka Univ.)

Keywords:lithium niobate,ridge waveguide,ion slice

High-refractive-index-contrast thin film ridge waveguides can confine light more strongly than conventional Ti-indiffused or annealed/proton-exchanged waveguides. We fabricated ridge waveguides in ion-sliced LiNbO₃ crystals by accelerated chemical etching in the proton-exchanged regions. We obtained the low-loss ridge waveguides of 1.0×0.7 μm² cross-sectional area. Strong light confinement was achieved at 1.55 μm wavelength.