The 76th JSAP Autumn Meeting, 2015

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16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[14p-2S-1~13] 16.3 Bulk, thin-film and other silicon-based solar cells

Mon. Sep 14, 2015 1:45 PM - 5:30 PM 2S (3F Lounge)

座長:石河 泰明(奈良先端大),松木 伸行(神奈川大)

1:45 PM - 2:00 PM

[14p-2S-1] Activation annealing for P Cat-doped a-Si films

〇Junichi Seto1,2, Keisuke Ohdaira1,2, Hideki Matsumura1,2 (1.JAIST, 2.JST CREST)

Keywords:activation annealing,a-Si