The 76th JSAP Autumn Meeting, 2015

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16 Amorphous and Microcrystalline Materials » 16.3 Bulk, thin-film and other silicon-based solar cells

[14p-2S-1~13] 16.3 Bulk, thin-film and other silicon-based solar cells

Mon. Sep 14, 2015 1:45 PM - 5:30 PM 2S (3F Lounge)

座長:石河 泰明(奈良先端大),松木 伸行(神奈川大)

2:45 PM - 3:00 PM

[14p-2S-5] Development of on-site SiH4 generator by narrow gap high density hydrogen plasma

〇FUMIYA SHINODA1, Hiroaki Kakiuchi1, Kiyoshi Yasutake1, Hiromasa Ohmi1 (1.Osaka Univ.)

Keywords:plasma,etching,microwave