[14p-2T-1~14] 17.1 Growth technology

△ [14p-2T-7] Low-activation energy process of graphene formation by plasma CVD

〇Ryuichi Kato¹, Satoshi Minami¹, Masataka Hasegawa^1,2 (1.TASC, 2.AIST)

Keywords:graphene,growth mechanism