[14p-2U-1~11] 17.4 Device applications

△ [14p-2U-5] Contact resistivity between carbon nanotubes

〇(D)Masafumi Inaba¹, Chih-Yu Lee¹, Kazuma Suzuki¹, Yu Hirano¹, Fei Wenxi¹, Wataru Norimatsu², Michiko Kusunoki², Hiroshi Kawarada¹ (1.Waseda Univ., 2.Nagoya Univ.)

Keywords:carbon nanotube,contact resistivity,tunnel

For carbon nanotube electrical application, such as CNT dispersed cannel thin film transistors and CNT yarns, evaluation of contact resistivity between CNTs are inevitable. In this study, CNT/CNT contact resistivity was evaluated from in-plane conductivity of CNT forest on silicon carbide.