1:15 PM - 1:30 PM
[14p-4E-4] Effect of UV light irradiation on organic materials during gas cluster ion beam etching
Keywords:Gas Cluster Ion Beam
Oral presentation
7 Beam Technology and Nanofabrication » 7.6 Ion beams
Mon. Sep 14, 2015 12:30 PM - 6:15 PM 4E (437)
座長:阿保 智(阪大),瀬木 利夫(京大),柳沢 淳一(滋賀県立大)
1:15 PM - 1:30 PM
Keywords:Gas Cluster Ion Beam