1:45 PM - 2:00 PM
[14p-4E-6] Oblique etching with ClF3 neutral cluster beam
Keywords:cluster,neutral beam
Oral presentation
7 Beam Technology and Nanofabrication » 7.6 Ion beams
Mon. Sep 14, 2015 12:30 PM - 6:15 PM 4E (437)
座長:阿保 智(阪大),瀬木 利夫(京大),柳沢 淳一(滋賀県立大)
1:45 PM - 2:00 PM
Keywords:cluster,neutral beam