[14p-4E-1~21] 7.6 Ion beams

[14p-4E-9] Optical properties and Ion-implanted dose monitor by Ion-implanted Quartz

〇Shuhei Tanaka¹, Yoshiko Ueno¹, Sumie Toshida¹, Koji Matsuda², Tsutomu Nagayaama², Yutaka Inouchi² (1.NGF Tsukuba-Lab., 2.Nissin Ion Equip.)

Keywords:ion solid interactions,ion implantation,quart

Boron and nitrogen ions are implanted into the quartzs. These quartzs emitted visible and ultraviolet light under the ultraviolet light stimulation. Boron-implanted quartz emitted the light at the several times stronger than nitrogen-implanted quartzs. But the emission spectrums are nearly same between these implanted elements. The intensity of the emission showed the linear and anti-linear region for these spectrums.