[14p-PA10-1~16] 6.4 Thin films and New materials

△ [14p-PA10-2] Phase selective solid-phase crystallization and control of orientation in vanadium oxide thin films via post-annealing under uniaxial compression

〇yasuhisa nozawa¹, kodai shimada¹, ryotaro namba¹, goon tan¹, satoru kaneko², akifumi matsuda¹, mamoru yoshimoto¹ (1.Tokyo Tech., 2.Kanagawa Ind. Tech.)

Keywords:vanadium oxide,solid-phase growth,thermal nanoimprint