The 76th JSAP Autumn Meeting, 2015

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Poster presentation

6 Thin Films and Surfaces » 6.4 Thin films and New materials

[14p-PA10-1~16] 6.4 Thin films and New materials

Mon. Sep 14, 2015 4:00 PM - 6:00 PM PA10 (Event Hall)

4:00 PM - 6:00 PM

[14p-PA10-6] Growth of anatase TaON thin film on glass substrate using anatase TiO2 polycrystalline seed layer

〇(D)Atsushi Suzuki1,2,3, Yasushi Hirose1,2,3, Shoichiro Nakao2,3, Tetsuya Hasegawa1,2,3 (1.Univ. of Tokyo, 2.KAST, 3.JST-CREST)

Keywords:Oxynitride,Anatase structure