[14p-PA10-1~16] 6.4 Thin films and New materials

[14p-PA10-8] Preparation and Characterization of All-ALD-Grown Films with High Moisture Permeation Barrier

〇Hideaki Zama¹, Kazuhiro Honda¹, Shuji Osono¹ (1.ISM, ULVAC,Inc.)

Keywords:atomic layer deposition,moisture permeation barrier

We have proposed all ALD multilayers with high moisture permeation barrier for protecting micro device from humidity, and will report their preparation and characterization.