[14p-PA11-1~8] 6.6 Probe Microscopy

[14p-PA11-2] Analysis of the surface current charge which happens at the time of on c-Si substrate of
α-Si thin film measurement using a conductivity Atomic Force Microscope

〇(M2)Syunnsuke Sawaki¹, Satoshi Nishida¹, Shizuma Kuribayashi¹ (1.E.R.E.S Graduate school of Eng.,Gifu Univ.)

Keywords:amorphous silicon,Atomic force microscope