[14p-PA12-1~9] 3.7 Laser processing

[14p-PA12-9] Analysis of Micro photo fablication process with a quartz crystal sensor

〇Satoshi Tuchiya¹, Hiroshi Muramatu¹ (1.TOkyo univ. of tech)

Keywords:quartz crystal sensor,3D printer,Femtosecond laser

We have monitored a micro photofablication process using a quartz crystal sensor. The quartz crystal sensor responded to the scanning of the laser spot. The resonant frequency increased with the laser irradiation, and the resonant frequency change included a slight decrease due to the mass increase. The study will be applied to analyze the radial sensitivity of the quartz crystal sensor.